Study of the structural and reflective characteristics of short-period Mo/Be multilayer X-ray mirrors

A series of short-period Mo/Be multilayer mirrors (MLs) have been studied using the methods of X-ray reflectometry, diffuse X-ray scattering and interferometry. It is shown that the structure of the MLs (the presence of diffraction orders in the angular dependence of the reflection coefficient) is observed at least up to a period of 1.29 nm. Also, when approaching extremely small period values, starting from 1.64 nm, a sharp increase in the width of the transition region between the mirror layers is observed.