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Zhurnal Tekhnicheskoi Fiziki, 2024 Volume 94, Issue 8, Pages 1280–1287 (Mi jtf6830)

XXVIII International Symposium ''Nanophysics and Nanoelectronics'', Nizhny Novgorod, March 11-15, 2024
Physical electronics

Ni-based multilayer structures for Goebel-type mirrors

K. V. Durov, V. N. Polkovnikov, N. I. Chkhalo, A. A. Akhsakhalyan, I. V. Malyshev

Institute of Physics of Microstructures, Russian Academy of Sciences, 603950 Nizhny Novgorod, Russia

Abstract: In this work, the characteristics of the Ni$_{80}$Mo$_{20}$/Si multilayer structure, which is promising for the manufacture of Goebel mirrors, were studied for the first time. The structural parameters of the multilayer structure were determined. It is shown that the values of the transition regions for $\sigma$(Ni$_{80}$Mo$_{20}$) and $\sigma$(Si) are 5 and 8.5 $\mathring{\mathrm{A}}$, respectively. The composition of the structures was found at which the best reflectivity $R$ = 69.5–56.1% was achieved for periods of 41.5–32 $\mathring{\mathrm{A}}$.

Keywords: multilayer X-ray mirrors, magnetron sputtering, Goebel mirrors.

Received: 07.05.2024
Revised: 07.05.2024
Accepted: 07.05.2024

DOI: 10.61011/JTF.2024.08.58555.149-24



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© Steklov Math. Inst. of RAS, 2025