Correlative extreme ultraviolet, ultraviolet and optical microscopy based on a specular microscope with axial tomography

The work is devoted to the use of a mirror extreme ultraviolet microscope with a magnification of 46 times and a resolution of up to 140 nm for studying samples at three wavelengths: 13.84 nm, 200 nm and 535 nm is considered. The ability to see one area of a sample at different wavelengths provides additional information about its structure. The choice of wavelength occurs by changing sources: LED or gas laser-plasma source, as well as input-output of a multilayer filter that cuts off everything except 13.84 nm. For three-dimensional reconstruction, the sample was scanned along the optical axis using a piezo actuator. In reconstructing images from tomographic data, a point spread function is used, modeled on the basis of aberrations measured on an interferometer.