Quantitative local elemental composition analysis of the of materials by EELS technique in STEM under conditions of core-loss lines overlapping

A method has been developed for processing spectra of characteristic electron energy losses for quantitative analysis of atomic concentrations of elements within the framework of STEM in conditions of close proximity of lines of various elements. In addition, the case of the presence of features on the spectra of energy losses is considered, which, in turn, makes it difficult to isolate the background within the framework of a standard analysis. Using the example of the study of the atomic composition of a thin NbN film, it is shown that the dispersion of the obtained concentration values for various points of the sample is reduced to several atomic percent.