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Zhurnal Tekhnicheskoi Fiziki, 2024 Volume 94, Issue 8, Pages 1372–1381 (Mi jtf6841)

Solid-State Electronics

Registration of pulsed terahertz radiation with uncooled matrix microbolometric detectors

M. A. Dem'yanenkoa, I. V. Marchishina, D. V. Shcheglova, V. V. Startsevb

a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, 630090 Novosibirsk, Russia
b State Research Center of Russian Federation, Federal State Unitary Enterprise "Research, Development, and Production Center "Orion", 111538 Moscow, Russia

Abstract: The response of uncooled matrix microbolometric detectors with a thin metal absorber to pulsed terahertz radiation is studied depending on the pulse duration, its repetition frequency, thermal conductivity and bolometer thermal relaxation time, which change with increasing gas pressure in the receiver housing, as well as on the polarization of terahertz radiation. It is shown that the peak value of the microbolometer signal weakly depends on thermal conductivity if the duration of the radiation pulses is less than the bolometer thermal relaxation time. Under the opposite condition, the peak value of the microbolometer signal is inversely proportional to the thermal conductivity value. The manufactured and investigated detectors at a wavelength of 100 $\mu$m are characterized by a minimum detectable power of 1.4 $\cdot$ 10$^{-9}$ W and a minimum detectable energy of 2.5 $\cdot$ 10$^{-11}$ J.

Keywords: thermal conductivity, thermal relaxation time, minimum detectable energy.

Received: 09.04.2024
Revised: 11.06.2024
Accepted: 18.06.2024

DOI: 10.61011/JTF.2024.08.58566.115-24



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