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Zhurnal Tekhnicheskoi Fiziki, 2023 Volume 93, Issue 7, Pages 867–879 (Mi jtf7020)

XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Theoretical and Mathematical Physics

The theory of axial tomography based on the inverse Radon transform for high-aperture soft X-ray microscopy

K. P. Gaikovich, I. V. Malyshev, D. G. Reunov, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia

Abstract: For soft X-ray microscopy in the approximation of geometrical optics, a theoretical model for the formation of the received image is constructed - a relationship is found between the image recorded on the detector and the 3$D$ distribution of the sample absorption index using a high-aperture mirror objective (NA > 0.3) with a focus depth close to the diffraction limit. The solution of the inverse problem of tomography for determining this 3$D$ distribution from the data of measurements in a high-aperture mirror SXR-microscope is obtained.

Keywords: soft x-ray microscopy, inverse problem of microscopy, absorption contrast imaging.

Received: 02.05.2023
Revised: 02.05.2023
Accepted: 02.05.2023

DOI: 10.21883/JTF.2023.07.55739.106-23



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