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Zhurnal Tekhnicheskoi Fiziki, 2023 Volume 93, Issue 7, Pages 884–891 (Mi jtf7022)

XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Plasma

The study of the process of hydrogenation of single-walled carbon nanotubes using inductively coupled argon-hydrogen plasma

E. I. Preobrazhenskya, A. V. Vodopyanovab, A. V. Nezhdanovb

a Federal Research Center A.V. Gaponov-Grekhov Institute of Applied Physics of the Russian Academy of Sciences, Nizhny Novgorod, Russia
b National Research Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, Russia

Abstract: In this article it was demonstrated the possibility of partial hydrogenation of single-walled carbon nanotubes using an inductively coupled argon-hydrogen plasma. It was studied the changes in the Raman spectrum of samples of single-walled carbon nanotubes during plasma hydrogen intercalation with depending on the treatment time, the discharge power, the substrate material on which the nanotubes were deposited, and the control external voltage. The predominant role of hydrogen ions in the hydrogenation of single-walled carbon nanotubes has been demonstrated.

Keywords: plasma chemistry, single-walled carbon nanotubes, hydrogenation,inductively coupled plasma, SWCNTs.

Received: 05.04.2023
Revised: 05.04.2023
Accepted: 05.04.2023

DOI: 10.21883/JTF.2023.07.55741.71-23



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