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Zhurnal Tekhnicheskoi Fiziki, 2023 Volume 93, Issue 7, Pages 931–935 (Mi jtf7029)

XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Physics of Nanostructures

Investigation of the properties of multilayer mirrors based on a pair of materials Mo/B$_4$C

R. A. Shaposhnikov, S. A. Garakhin, K. V. Durov, V. N. Polkovnikov, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, Russia

Abstract: The properties of Mo/B$_4$C multilayer X-ray mirrors with periods of 3.74–3.84 nm are studied in this work. The dependences of the transmission band, reflection coefficient and the magnitude of internal stresses in mirrors on the ratio of material thicknesses in the period were investigated. The results of a study of the effect of thermal annealing on the structural parameters and reflective characteristics of mirrors are also presented in the paper.

Keywords: multilayer X-ray mirrors, synchrotron applications, X-ray monochromators.

Received: 09.04.2023
Revised: 09.04.2023
Accepted: 09.04.2023

DOI: 10.21883/JTF.2023.07.55748.77-23



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