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Zhurnal Tekhnicheskoi Fiziki, 2023 Volume 93, Issue 7, Pages 1014–1018 (Mi jtf7043)

XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Physical Electronics

Magnetic field visualization in scanning electron microscope

D. A. Tatarskiiab, E. V. Skorokhodova, S. A. Guseva

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b National Research Lobachevsky State University of Nizhny Novgorod, 603950 Nizhny Novgorod, Russia

Abstract: The fundamental possibility of measuring the stray fields distributions of magnetic objects in a scanning electron microscope is demonstrated. The main idea of the method is to use a sample holder for operation in the mode of a scanning transmission microscope, additionally equipped with a square diffraction grating. This grating, formed on the basis of a metal film, is placed at some distance under the magnetic sample. Reconstruction of the deflections of transmitted electrons by analyzing the geometric phase from visible distortions of the diffraction grating made it possible to reconstruct the distribution of the magnetic field created by the sample under study.

Keywords: magnetic field, scanning electron microscope, lorentz microscopy, magnetic nanostructures.

Received: 12.04.2023
Revised: 12.04.2023
Accepted: 12.04.2023

DOI: 10.21883/JTF.2023.07.55762.81-23



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