D. V. Petrova, M. S. Mikhailenko, M. V. Zorina, M. N. Drozdov, A. E. Pestov, N. I. Chkhalo, “The coating a liquid glass of the optical element substrates and its molecular composition”, Zhurnal Tekhnicheskoi Fiziki, 2023, Volume 93, Issue 7,Pages <nobr>1037

XXVII International Symposium "Nanophysics and Nanoelectronics" N. Novgorod, March 13-16, 2023
Physical Electronics

The coating a liquid glass of the optical element substrates and its molecular composition

D. V. Petrova^ab, M. S. Mikhailenko^a, M. V. Zorina^a, M. N. Drozdov^a, A. E. Pestov^a, N. I. Chkhalo^a

^a Institute for Physics of Microstructures, Russian Academy of Sciences, 607680 Nizhny Novgorod, Russia
^b Lobachevsky State University, 603950 Nizhny Novgorod, Russia

Abstract: The article presents the results obtained by coating a liquid glass solution to the substrates of optical elements, followed by their etching with an ion beam. Particular attention is turned on the surface roughness of the optical element both after the deposition of liquid glass and after etching. A film of the applied glass composition was studied using secondary ion mass spectrometry (SIMS).

Keywords: liquid glass, films, surface roughness, polishing, ion etching, secondary ion mass spectrometry.

Received: 02.05.2023
Revised: 02.05.2023
Accepted: 02.05.2023

DOI: 10.21883/JTF.2023.07.55766.107-23