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Zhurnal Tekhnicheskoi Fiziki, 2023 Volume 93, Issue 11, Pages 1631–1636 (Mi jtf7130)

Physics of nanostructures

Effect of thermal annealing on properties Ga$_2$O$_3$/GaAs:Cr heterostructures

V. M. Kalygina, O. S. Kiseleva, V. V. Kopyev, B. O. Kushnarev, V. L. Oleynik, Yu. S. Petrova, A. V. Tsymbalov

Tomsk State University, Tomsk, Russia

Abstract: Data on the sensitivity of Ga$_2$O$_3$/GaAs:Cr heterostructures are presented to long-wave and UV ($\lambda$ = 254 nm) radiation. The samples were obtained by RF magnetron sputtering of a gallium oxide film on non-heated GaAs:Cr substrates. Gallium arsenide plates with a Ga$_2$O$_3$ film were divided into two parts: one half was not annealed, and the other was annealed in argon at 500$^\circ$C for 30 min. Regardless of the presence or absence of heat treatment, the studied structures exhibit a photovoltaic effect and are able to operate in an autonomous mode. It is shown that a noticeable sensitivity to long-wave radiation appears in the samples only after thermal annealing of gallium oxide films. The response and recovery times of such UV radiation detectors do not exceed 1 second.

Keywords: dark current, photocurrent, UV radiation, Ga$_2$O$_3$/GaAs:Cr structures, autonomous operation mode.

Received: 02.06.2023
Revised: 08.09.2023
Accepted: 11.09.2023

DOI: 10.61011/JTF.2023.11.56495.140-23



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