Study of the surface and subsurface layer of CVD-grown substrates after ultrafine polishing

Diamond substrates have been polished with different techniques. The results of the investigation of substrate surface after treatments are presented. It is shown that the magnetorheologic treatment is promising technique for ultrafine polishing. The data obtained with atomic-force microscopy, optical profilometry and X-ray reflexometry confirm the smoothing of diamond surface and thinning of subsurface layer after the ultrafine treatment.