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Zhurnal Tekhnicheskoi Fiziki, 2022 Volume 92, Issue 9, Pages 1467–1470 (Mi jtf7450)

Experimental instruments and technique

Method for measuring the dielectrics charging potential under ion irradiation using shifting the bremsstrahlung edge

A. A. Tatarintseva, N. A. Orlikovskyb, N. G. Orlikovsayaa, K. E. Ozerovaa, Ya. E. Shahovab

a Lomonosov Moscow State University, Faculty of Physics, 119991 Moscow, Russia
b Skolkovo Institute of Sciences and Technology, AICF, 121205 Moscow, Russia

Abstract: A method is proposed for measuring high-voltage charging potentials of dielectrics under ion irradiation by shifting the boundary of the bremsstrahlung X-ray spectrum. Since there is no bremsstrahlung output during Xe$^+$ ion irradiation, it was proposed to use a probing electron beam to generate bremsstrahlung X-rays. To eliminate the effect of charge compensation on the surface, the value of the current of the probing probe of electrons was selected. The values of the equilibrium charging potentials of Al$_2$O$_3$ ceramics, Al$_2$O$_3$ sapphire, SiO$_2$, and Teflon are obtained at different ion irradiation energies. The data obtained are compared with the results of spectrometric studies.

Keywords: dielectric charging, ion irradiation, FIB-SEM, surface potential measurement.

Received: 01.04.2022
Revised: 19.05.2022
Accepted: 21.05.2022

DOI: 10.21883/JTF.2022.09.52940.81-22



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