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Zhurnal Tekhnicheskoi Fiziki, 2022 Volume 92, Issue 11, Pages 1727–1732 (Mi jtf7479)

Physical electronics

Electron microscopy of the microstructure of antimony thin films of variable thickness

V. Yu. Kolosova, A. A. Yushkova, L. M. Veretennikovab, A. O. Bokuniaevaa

a Ural Federal University named after the First President of Russia B. N. Yeltsin, Yekaterinburg, Russia
b Ural State University of Economics, 620144 Ekaterinburg, Russia

Abstract: Thin Sb films with a thickness gradient deposited in vacuum were investigated by transmission electron microscopy. Microstructures in films with increasing thickness change from amorphous islands of increasing density and size to labyrinthine and continuous films with texturing, which also changes with increasing thickness. Based on the analysis of the patterns of bend extinction contours, a strong internal bending of the crystal lattice, up to 120 deg/$\mu$m, and the dependence of the crystallographic orientations in the structures of the film on the thickness were revealed.

Keywords: antimony, thin films, TEM, crystallography, extinction bend contours.

Received: 12.01.2022
Revised: 26.07.2022
Accepted: 27.07.2022

DOI: 10.21883/JTF.2022.11.53447.09-22



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© Steklov Math. Inst. of RAS, 2025