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Zhurnal Tekhnicheskoi Fiziki, 2025 Volume 95, Issue 3, Pages 598–605 (Mi jtf7530)

Special issue on the materials of the International Conference "Nanocarbon and Diamond" (NiA'2024)
Physical electronics

Surface analysis of polycrystalline CVD diamond after static thermochemical treatment

A. V. Lebedenkoab, I. V. Klepikovabc, E. N. Kulikovd, A. V. Deryabkind, Yu. Yu. Fedorovd, V. A. Shepelevb, A. A. Altukhovb

a Saint Petersburg State University, St. Petersburg, Russia
b MIREA — Russian Technological University, Moscow, Russia
c Almaz Scientific and Production Complex, Sestroretsk, Russia
d Research and Production Corporation "Istok" named after Shokin, Fryazino, Moskovskaya obl.

Abstract: This paper presents a comprehensive surface analysis of polycrystalline CVD diamond after static thermochemical treatment (TCT). The study focuses on subtle changes in the morphology and surface roughness of the diamond before and after TCT. Optical, atomic force, and scanning electron microscopy methods were used to conduct the analysis, allowing for detailed characterization of both macroscopic and microscopic changes. The results show a reduction in surface roughness parameters, significant changes in surface relief and textures, indicating the effectiveness of TCT for such a complex material as polycrystalline diamond.

Keywords: CVD diamond, polycrystalline diamond, polycrystal, surface roughness, thermochemical treatment method, thermochemical treatment.

Received: 18.10.2024
Revised: 18.10.2024
Accepted: 18.10.2024

DOI: 10.61011/JTF.2025.03.59867.322-24



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© Steklov Math. Inst. of RAS, 2025