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Zhurnal Tekhnicheskoi Fiziki, 2025, Volume 59, Issue 6, Pages 1148–1156 (Mi jtf7593)

Solid-State Electronics

Schottky diodes based on monocrystalline Al/AlGaN/GaN heterostructures for zero-bias microwave detection

N. V. Vostokov, M. N. Drozdov, M. A. Kalinnikov, S. A. Kraev, D. N. Lobanov, P. A. Yunin

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod

Abstract: The microwave properties of novel all-epitaxial Al/AlGaN/GaN low-barrier Schottky diodes with near-surface polarization-induced delta-doping are studied. An original technique for on-wafer microwave measurements of test structures is used. The possibility of development of a highly sensitive zero-bias microwave detector based on a planar low-barrier metal-semiconductor-metal heterostructure, which does not require the formation of ohmic contact of the semiconductor with the metal, is demonstrated. Estimates show that the cutoff frequency of such a detector can reach approximately 100 GHz for relevant values of the detecting contact area about 10 $\mu$m$^2$.

Keywords: low-barrier GaN Schottky diode, on-wafer microwave measurements, structural defects and trap states in a semiconductor, zero-bias microwave detector.

Received: 27.04.2024
Revised: 30.12.2024
Accepted: 11.02.2025

DOI: 10.61011/JTF.2025.06.60464.151-24



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© Steklov Math. Inst. of RAS, 2025