A. Yu. Andreev, V. P. Kuznetsov, V. A. Tolomasov, “SHARP ADMIXTURE PROFILES IN SILICON STRUCTURES GROWN FROM THE MOLECULAR-FLOW IN VACUUM”, Zhurnal Tekhnicheskoi Fiziki, 1987, Volume 57, Issue 6,Pages <nobr>1204

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Zhurnal Tekhnicheskoi Fiziki, 1987 Volume 57, Issue 6, Pages 1204–1206 (Mi jtf772)

Brief Communications

SHARP ADMIXTURE PROFILES IN SILICON STRUCTURES GROWN FROM THE MOLECULAR-FLOW IN VACUUM

A. Yu. Andreev, V. P. Kuznetsov, V. A. Tolomasov

Gor'kii State University

UDC: 539.23 : 546.28

Received: 19.06.1986

Fulltext: PDF file (356 kB)

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