Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides

The nitrides of high-entropy alloys, (TiZrAlYNb)N, fabricated by cathodic vacuum arc evaporation are studied with electron microscopy, atomic force microscopy, laser scanning microscopy; energy-dispersive X-ray analysis, X-ray phase analysis, time-of-flight secondary-ion mass spectrometry; and hardness measurements. It is found that the deposition parameters influence the structure, surface morphology, element distribution, and mechanical properties. The structural–phase state of the coatings before and after the ion implantation of heavy negative gold ions Au$^-$ are compared.