V. M. Beresnev, I. N. Torianyk, O. V. Sobol', A. D. Pogrebnyak, A. Yu. Kropotov, N. G. Stervoedov, U. S. Nemchenko, D. A. Kolesnikov, S. A. Klimenko, P. V. Turbin, “AlN–TiB$_2$–TiSi$_2$ coatings obtained by pulsed magnetron sputtering”, Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 84, Issue 8,Pages 118

This article is cited in 2 papers

Physics of nanostructures

AlN–TiB$_2$–TiSi$_2$ coatings obtained by pulsed magnetron sputtering

V. M. Beresnev^a, I. N. Torianyk^a, O. V. Sobol'^b, A. D. Pogrebnyak^c, A. Yu. Kropotov^ad, N. G. Stervoedov^a, U. S. Nemchenko^a, D. A. Kolesnikov^e, S. A. Klimenko^f, P. V. Turbin^ad

^a V. N. Karazin Kharkiv National University
^b Khar'kov Polytechnical University
^c Sumy State University
^d Scientific Center of Physics and Technology of the Ministry of Education and Science of Ukraine and National Academy of Sciences of Ukraine
^e National Research University "Belgorod State University"
^f V. Bakul Institute for Superhard Materials of the National Academy of Sciences of Ukraine, Kiev

Abstract: AlN–TiB$_2$ composite ceramic samples with a TiSi$_2$ additive are obtained by magnetron sputtering. After deposition, ordered regions in the coatings measure 1 nm across, so that they can be categorized as amorphous-like. Annealing at 900 and 1300$^\circ$C causes crystallization with grain sizes of 11 and 25 nm, respectively. However, crystallization does not dramatically deteriorate the mechanical properties owing to the formation of high-enthalpy phases (AlB$_2$ at 900$^\circ$C and AlB$_3$ at 1300$^\circ$C). The hardness of the coatings varies from 15.1 GPa in the as-prepared samples to 11.0 GPa after annealing to 1300$^\circ$C. This makes it possible to improve the wear resistance of edge tools with these coatings by a factor of 1.32 at a temperature of 1300$^\circ$C near the contact.

Received: 03.10.2013