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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive
Zhurnal Tekhnicheskoi Fiziki, 1987 Volume 57, Issue 7, Pages 1441–1443 (Mi jtf824)
Brief Communications

EFFECT OF PRESSURE DECREASING ON THE MASS-TRANSFER IN THE FLOW-TYPE GAS-EPITAXIAL REACTORS

A. I. Zhmakin, Yu. I. Makarov

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad

UDC: 532.516 : 621.382.382.002

Received: 31.07.1986



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