Theoretical analysis of impurity precipitation in nanopores in crystals. II: Kinetics of impurity cluster growth in pores

The kinetics of the formation of impurity clusters in subsurface nanopores in crystals is studied theoretically. A physical model of precipitation of the impurity phase in nanopores in a sample with sinks of various types is developed. This model forms the basis for the calculation of the annealing kinetics of copper containing subsurface pores and cobalt impurity atoms. The optimal annealing conditions are determined in which cobalt atoms diffuse predominantly into pores and form impurity clusters in them.