Crystallization and thermochromism of annealed heterostructures containing titanium and tungsten oxide films

Crystalline phases in heterostructures containing titanium and tungsten oxide films are studied after step annealing in vacuum at temperatures between 500 and 750$^\circ$C. The films are deposited on a silica glass substrate by dc reactive magnetron sputtering. It is found that crystalline phases in single layers and bilayer structures form in a different way. In the latter, crystallization is influenced by the order of layer arrangement on the substrate. Thermochromism in structures annealed in vacuum is due to the oxygen-deficient phase WO$_{3-x}$ belonging to the hexagonal syngony. This phase intensely grows as the temperature rises from 650 to 750$^\circ$C.