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Zhurnal Tekhnicheskoi Fiziki, 2012 Volume 82, Issue 4, Pages 42–51 (Mi jtf8792)

This article is cited in 10 papers

Gas Discharges, Plasmas

Diagnostics of the atmospheric-pressure plasma parameters using the method of near-field microwave sounding

D. V. Yanin, A. V. Kostrov, A. I. Smirnov, M. E. Gushchin, S. V. Korobkov, A. V. Strikovskii, V. I. Gundorin, V. V. Nazarov, M. V. Starodubtsev

Institute of Applied Physics, Russian Academy of Sciences, Nizhni Novgorod, 603950, Russia

Abstract: A method of resonant near-field microwave probing is developed for contactless diagnostics of a high-pressure plasma. The efficiency of this method in measuring the parameters of the plasma of an rf capacitive discharge in argon under atmospheric pressure is demonstrated. The experimental results are compared with the data obtained using the independent method, the microwave radiation “cutoff”, and with theoretical estimates.

Received: 21.04.2011


 English version:
Technical Physics, 2012, 57:4, 468–477

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