Magnetron and pulsed laser deposition of silver and gold nanoparticles and discontinuous films and their optical properties

Ag and Au nanoparticles are obtained by magnetron sputtering and pulsed laser deposition under different conditions, and the features of their absorption spectra associated with plasmon resonances are investigated. Optimal deposition conditions for obtaining small (5–10 nm) silver nanoparticles with a high density of surface distribution include an increased argon pressure (2.5 $\times$ 10$^{-2}$ Torr) and a low discharge voltage (100 V). Gold nanoparticle arrays obtained by pulsed laser deposition at a temperature of 200$^\circ$C in vacuum are more uniformly distributed on the substrates than those deposited at room temperature in argon. It is shown that the maximum of the plasmon absorption shifts toward shorter wavelengths with a decrease in the equivalent thickness of metal films and depends not only on this thickness but also on the type of substrate, which is responsible for the morphology of nanoparticle arrays.