I. V. Blonskii, A. А. Goncharov, A. V. Demchishin, A. N. Evsyukov, E. G. Kostin, V. A. Sal’nikov, A. G. Tereshchenko, L. N. Tkachenko, “Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis”, Zhurnal Tekhnicheskoi Fiziki, 2009, Volume 79, Issue 7,Pages <nobr>127

This article is cited in 4 papers

Experimental Instruments and Methods

Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis

I. V. Blonskii^a, A. А. Goncharov^a, A. V. Demchishin^b, A. N. Evsyukov^a, E. G. Kostin^c, V. A. Sal’nikov^a, A. G. Tereshchenko^a, L. N. Tkachenko^a

^a Institute of Physics, National Academy of Sciences of Ukraine, Kiev
^b Frantsevich Institute of Materials Science Problems, National Academy of Sciences of Ukraine, Kiev
^c Institute for Nuclear Research of the National Academy of Sciences of Ukrainian, Kyiv, 03680, Ukraine

Abstract: The results of comprehensive experimental investigation into the plasma-dynamic and optical characteristics of a magnetron cylindrical gas discharge are reported. Experiments are carried out under computer monitoring of the spectrum radiated by the discharge plasma in the visual range. Optimal conditions for TiN binary compound synthesis are found. They are provided by maintaining the intensities of the reactant and plasma-forming gas spectral lines. Characterization of synthesized films is given.

Received: 04.03.2008
Accepted: 11.11.2008