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JOURNALS // Zhurnal Tekhnicheskoi Fiziki // Archive
Zhurnal Tekhnicheskoi Fiziki, 1987 Volume 57, Issue 11, Pages 2247–2250 (Mi jtf995)
Brief Communications

TEMPERATURE CONTROL OF COMPOSITION DISTRIBUTION ON THE EPITAXIAL LAYER WIDTH

G. I. Zjovnir, S. V. Kletsky

Institute of Semiconductors of the Academy of Sciences of the Ukrainian SSR

Received: 31.07.1986



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