Abstract:
A new method for the synthesis of volatile tin(ii) hexafluoroacetylacetonate [Sn(C5HO2F6)2] was suggested, the compound was characterized by elemental analysis, IR spectroscopy, and DTA/TGA; the crystal structure was established by X-ray diffraction; the morphology and composition of the coating deposited by atmospheric pressure chemical vapour deposition were studied by SEM-EDX and XRD.
Keywords:CVD, tin oxide, films, precursor, tin hexafluoroacetylacetonate.