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JOURNALS // Nanosystems: Physics, Chemistry, Mathematics // Archive

Nanosystems: Physics, Chemistry, Mathematics, 2017 Volume 8, Issue 1, Pages 75–78 (Mi nano11)

This article is cited in 1 paper

PHYSICS

Simulation of DIBL effect in junctionless SOI MOSFETs with extended gate

A. E. Atamuratova, M. Khalilloeva, A. Abdikarimova, Z. A. Atamuratovaa, M. Kittlerb, R. Granznerb, F. Schwierzb

a Urganch State University, Kh. Olimjan, 14, Urganch, 220100, Uzbekistan
b Technical University of Ilmenau, Ehrenbergstrasse, 29, 98693 Ilmenau, Germany

Abstract: Short channel effects such as DIBL are compared for trigate SOI Junctionless MOSFET with extended and non-extended lateral part of the gate. A trigate SOI JLMOSFET with gate length L$_{\operatorname{gate}}$, a silicon body width W$_{\operatorname{tin}}$ and thickness of 10 nm are simulated. In order to calculate the DIBL, the transfer characteristics of JLMOSFETs was simulated at a donor concentration of $5\cdot10^{19}$cm$^{-3}$ in the silicon body. The equivalent oxide thicknesses of the HfO$_2$ gate insulator used in simulation was 0.55 nm. Simulation result showed the DIBL for the trigate JLMOSFET depended on the length of the lateral part of the gate L$_{\operatorname{ext}}$. DIBL is high for devices with gates having extended lateral parts. This is a result of parasitic source (drain)-gate capacitance coupling which is higher for longer L$_{\operatorname{ext}}$.

Keywords: Junctionless MOSFET, DIBL, parasitic capacitance.

PACS: 85.30.Tv

Received: 08.07.2016
Revised: 30.08.2016

Language: English

DOI: 10.17586/2220-8054-2017-8-1-75-78



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