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JOURNALS // Nanosystems: Physics, Chemistry, Mathematics // Archive

Nanosystems: Physics, Chemistry, Mathematics, 2023 Volume 14, Issue 1, Pages 86–88 (Mi nano1165)

PHYSICS

Electrical properties of “metal-carbon film” contact

Rostyslav V. Shalayev, Anatoliy I. Izotov, Vladimir V. Syrotkin

Galkin Donetsk Institute for Physics and Engineering, Donetsk, Russia

Abstract: Magnetron sputtering was used to obtain carbon films on of metal substrates of two types: titanium and tool chromium steel. The temperature dependence of the resistance of the films, which has a semiconductor character, has been studied. The current-voltage characteristics of the metal-carbon film contact were determined, which indicate the presence of the Schottky barrier junction.

Keywords: carbon film, magnetron sputtering, metal-semiconductor contact, Schottky barrier.

Received: 24.01.2023
Revised: 02.02.2023
Accepted: 05.02.2023

Language: English

DOI: 10.17586/2220-8054-2023-14-1-86-88



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© Steklov Math. Inst. of RAS, 2024