Abstract:
The aim of this work was obtaining and experimental study of carbon nitride films. By the methods of thermogravimetric analysis (TGA), optical spectroscopy and scanning electron microscopy it was found that diamond-like films CNX consist of two phases: a nanostructured and amorphous. It was discovered that short-term heat treatment of the diamond-like films on air at 610 K results in etching of the amorphous phase and the formation of a divided columnar nanostructures.