Yu. D. Akulshin, A. V. Gluhovskoi, A. N. Kazakin, V. P. Kozlov, A. V. Korshunov, I. M. Komarevtcev, M. S. Lurie, E. N. Piatyshev, “Technologies & devices nmst lab”, St. Petersburg Polytechnical University Journal. Computer Science. Telecommunication and Control Sys, 2014, Issue 5(205),Pages <nobr>53

SEMICON Russia 2014

Technologies & devices nmst lab

Yu. D. Akulshin, A. V. Gluhovskoi, A. N. Kazakin, V. P. Kozlov, A. V. Korshunov, I. M. Komarevtcev, M. S. Lurie, E. N. Piatyshev

St. Petersburg Polytechnic University

Abstract: The given paper presents the research work results of the Nano- and Microsystems Technology laboratory in the field of the technology development and MEMS transducers for different purposes.

Keywords: technology, mems, transducers.

UDC: 621.3