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Optics and Spectroscopy, 2024 Volume 132, Issue 1, Pages 27–33 (Mi os1132)

Conference "Ultrafast Optical Phenomena (Ultra fast Light-2023)" October 2-4, 2023, Lebedev Institute of Physics, Russian Academy of Sciences
Laser physics and laser optics

Analysis of femtosecond modification of thin $a$-Ge$_2$Sb$_2$Te$_5$ films by XZ-scan

I. A. Budagovskya, D. O. Kuzovkovabc, P. I. Lazarenkob, M. P. Smaeva

a P. N. Lebedev Physical Institute, Russian Academy of Sciences, 119991 Moscow, Russia
b National Research University of Electronic Technology, 124498 Zelenograd, Moscow, Russia
c "Lasers and instruments", 124498 Zelenograd, Moscow, Russia

Abstract: Light-induced modification of thin Ge$_2$Sb$_2$Te$_5$ chalcogenide films using femtosecond laser radiation in the near-IR range (1030 nm) was studied. By means of two-coordinate (XZ) scanning, a modification stripe was recorded on the surface of the film. When the sample was shifted along the beam axis, the parameters of the acting radiation changed due to a change in the size of the irradiated area, which ensured a consistent change in the characteristic modes of modification: the formation of periodic two-phase surface structures, crystallization, pre-ablation structures, and ablation. The location of modification zones on the recorded stripe correlates with the radiation energy density, which makes XZ-scan a convenient way to determine both the radiation parameters necessary for film modification and the beam geometry.

Keywords: laser modification, femtosecond pulses, thin films, amorphous chalcogenides, optical microscopy.

Received: 11.12.2023
Revised: 09.01.2024
Accepted: 16.01.2024

DOI: 10.61011/OS.2024.01.57545.7-24



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