The grazing incidence reflection coefficient measurement with the usage of single channel scheme

The measurement of the grazing incidence reflection coefficient is one of the main methods of the evaluation of materials’ optical constants in extreme ultraviolet spectral range. The present work describes a single channel method of such measurement, where the direct and reflected radiation, dispersed in a grazing incidence spectrometer, has been detected simultaneously by means of CCD matrix. The algorithm of the spectrograms processing, based upon the usage of the spectral modulation function, has been proposed. The elaborated method has been applied to the silicon reflection coefficient measurements at 5$^\circ$ grazing incidence in the spectral range 8–25 nm. The Quasi-Flat Field spectrometer and fast capillary discharge have been used in the experiment.