Direct laser writing and investigation of optofluidic elements inside nanoporous silicate matrix

The paper demonstrates direct laser writing by femtosecond laser pulses ($\lambda$ = 1030 nm, $\tau$ = 220 fs, $\nu$ = 200 kHz) of functional optofluidic elements inside a nanoporous silicate matrix (NPSM). The influence of focused laser pulses led to the compaction of the nanoporous frame, which made it possible to fabricate barriers for the isolation of nanoporous cells and channel optical waveguides. The writing of microchannels in the mode of decompression of a nanoporous matrix with subsequent purification of debris area in distilled water under the action of ultrasound is also demonstrated. For each type of elements, the dependences of geometric characteristics on the energy parameters of laser radiation are established. The methods of testing the elements were also developed – checking the permeability of the barrier, the entering of laser radiation into channel waveguides.