A. E. Rupasov, P. A. Danilov, M. P. Smaev, M. S. Kovalyov, A. S. Zolot'ko, A. A. Ionin, S. I. Kudryashov, “3D microstructuring of silicate glass by femtosecond laser radiation”, Optics and Spectroscopy, 2020, Volume 128, Issue 7,Pages <nobr>918

This article is cited in 7 papers

Optics of low-dimensional structures, mesostructures, and metamaterials

3D microstructuring of silicate glass by femtosecond laser radiation

A. E. Rupasov^a, P. A. Danilov^a, M. P. Smaev^ab, M. S. Kovalyov^c, A. S. Zolot'ko^a, A. A. Ionin^a, S. I. Kudryashov^ad

^a P. N. Lebedev Physical Institute of the Russian Academy of Sciences, Moscow
^b D. Mendeleev University of Chemical Technology of Russia, Moscow, Russia
^c Bauman Moscow State Technical University
^d St. Petersburg National Research University of Information Technologies, Mechanics and Optics

Abstract: Silicon glass was microstructured by means of linear one-dimensional scanning of a tightly focused femtosecond laser beam with visible spectrum and different polarization in the bulk of the material. Optical microscopy revealed the formation of microstructures demonstrating enhanced extinction in the blue spectral range when the laser beam had linear or circular polarization. However, no birefringence was found in the microstructures.

Keywords: direct laser writing, femtosecond laser pulses, bulk functional nano- and micro-optical me-tastructures, birefringence.

Received: 10.01.2020
Revised: 11.02.2020
Accepted: 28.02.2020

DOI: 10.21883/OS.2020.07.49564.48-20