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JOURNALS // Optics and Spectroscopy // Archive

Optics and Spectroscopy, 2020 Volume 128, Issue 2, Pages 266–271 (Mi os481)

This article is cited in 3 papers

Optics of surfaces and interfaces

Invariants of the reflection coefficient

L. A. Fedyukhina, A. V. Gorchakovb, E. A. Kolosovskiia

a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University

Abstract: A detailed analysis of the reflection coefficient of linearly polarized in plane of incidence of a plane monochromatic wave from a three-layer structure is carried out. Solved the reverse problem ellipsometry for a three-layer structure. The existence of two reflection factor invariants for the flat-parallel plate is shown. A set of three observable parameters not previously used is proposed, which allows to restore the material parameters of the layer. Analytical expressions are obtained both for the reflection coefficient and incidence angles for a number of important particular cases, and for the direct calculation of the dielectric constant and layer thickness from the measured values of the observed parameters.

Keywords: Invariants of the reflection coefficient, reverse problem ellipsometry, Brewster angle, thin films.

Received: 21.06.2019
Revised: 24.10.2019
Accepted: 01.11.2019

DOI: 10.21883/OS.2020.02.48975.219-19


 English version:
Optics and Spectroscopy, 2020, 128:2, 257–263

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© Steklov Math. Inst. of RAS, 2024