Abstract:
Samples of thick (about 30 $\mu$m) films of undoped zinc oxide on sapphire prepared by magnetron sputtering using an uncooled target have been investigated. The structural and luminescence properties of the initial films and films subjected to additional recrystallization annealing in air have been studied. The time and temperature-dependent characteristics of the samples are considered. It is shown that annealing in air enhances the structural, optical, and luminescence properties of these films.
Keywords:ZnO thick films, magnetron sputtering method, ZnO green luminescence, temperature dependence of X-ray luminescence, electron microscopy, uncooled target.