RUS  ENG
Full version
JOURNALS // Optics and Spectroscopy // Archive

Optics and Spectroscopy, 2019 Volume 127, Issue 4, Pages 586–593 (Mi os579)

This article is cited in 1 paper

Special Issue "Physical Optics and Spectroscopy: Interdisciplinary Research"
Precision optical measurements and metrology

A methodology for measuring the parameters of large concave aspherical mirrors by means of a wavefront sensor

T. S. Piskunov, N. V. Baryshnikov, I. V. Zhivotovskii, A. A. Sakharov, V. A. Sokolovskii

Bauman Moscow State Technical University, 105005, Moscow, Russia

Abstract: A methodology has been developed for measuring radius $R_v$ and eccentricity (conic parameter $k$) of large concave aspherical mirrors using a wavefront sensor. Analytical expressions that directly relate Zernike coefficients $a_4$ and $a_9$ to parameters $R_v$ and $k$ of the mirror are obtained. It is shown that the technique does not require accurate mirror alignment before measurements. A computer analysis showed that the developed scheme enables measurements with errors of $\delta R_v<0.1\%$ and $\delta k<0.01$ for mirrors with radii from $100$ to $2000$ mm and with errors of $\delta R_{v}<0.01\%$ and $\delta k<0.001$ for mirrors with radii of more than $5000$ mm.

Keywords: aspherical surface, aspherical mirror, metrology, Shack–Hartmann sensor, wavefront sensor, radius of curvature, eccentricity, conic parameter, measurement errors, Zemax.

Received: 30.05.2019
Revised: 30.05.2019
Accepted: 04.06.2019

DOI: 10.21883/OS.2019.10.48362.167-19


 English version:
Optics and Spectroscopy, 2019, 127:4, 639–646

Bibliographic databases:


© Steklov Math. Inst. of RAS, 2024