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JOURNALS // Optics and Spectroscopy // Archive

Optics and Spectroscopy, 2019 Volume 127, Issue 4, Pages 594–602 (Mi os580)

This article is cited in 1 paper

Special Issue "Physical Optics and Spectroscopy: Interdisciplinary Research"
Precision optical measurements and metrology

Investigation of the possibility of measuring the radius of mirrors with instruments equipped with wavefront sensors

A. A. Sakharov, T. S. Piskunov, N. V. Baryshnikov, I. V. Zhivotovskii, E. E. Mukhina, M. V. Vyazovykh

Bauman Moscow State Technical University, 105005, Moscow, Russia

Abstract: A technique has been developed for measuring the radii of curvature of optical parts. A scheme of the device based on a wavefront sensor is proposed, which is characterized by a minimum measurement error. The theoretical substantiation of the measurement technique is given. A number of methods that make it possible to measure the radii of curvature of optical parts are considered. The reasons for an increase in the measurement error are analyzed. The results of measurements according to the given methodology with an original prototype device are considered.

Keywords: mirror radius, metrology, Shack–Hartmann sensor, wavefront sensor, radius of curvature, measurement technique, measurement errors, Zemax.

Received: 31.05.2019
Revised: 31.05.2019
Accepted: 04.06.2019

DOI: 10.21883/OS.2019.10.48363.169-19


 English version:
Optics and Spectroscopy, 2019, 127:4, 647–655

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