Influence of technological processes of forming on the properties of coatings based on polymers deposited from active gas phase (review). 1. Effect of conditions and modes of gas phase generation

The influence of energy and density of electron flux, the introduction into a target of low molecular weight compounds, laser assisting of the dispersion process, the plasma treatment of dispersion products on the molecular structure and properties of coatings based on polymers deposited from the gas phase were analyzed. The effectiveness of regulation of the structure and properties of the coatings by means of the conditions and modes change of the gas phase generation was determined.