V. V. Sidsky, A. V. Semchenko, V. V. Kolos, A. N. Pyatlitski, V. A. Solodukha, N. S. Kovalchuk, “Effect of heat treatment conditions on the structure and ferroelectric properties of SBTN-films synthesized by sol-gel method”, PFMT, 2017, Issue 1(30),Pages <nobr>17

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PHYSICS

Effect of heat treatment conditions on the structure and ferroelectric properties of SBTN-films synthesized by sol-gel method

V. V. Sidsky^a, A. V. Semchenko^a, V. V. Kolos^b, A. N. Pyatlitski^b, V. A. Solodukha^b, N. S. Kovalchuk^b

^a F. Scorina Gomel State University
^b JSC “INTEGRAL” Minsk

Abstract: The study of restorative and crystallization annealing on ferroelectric properties of SBTN-films with concentration of niobium 10–50 wt. % synthesized by the sol-gel method is presents. Effect of recovery annealing on the oxygen content in the SBTN ferroelectric film connected with the mass concentration of niobium is described.

Keywords: ferroelectric, non-volatile memory, sol-gel method, perovskite structure, crystallization and recovery annealing, capacitor layer, defects, residual polarization, SBTN-film.

UDC: 661.862

Received: 20.02.2017