Abstract:
The influence of sublayers of various nature on the phase composition and morphology of one-component and composite carbon
coatings is determined by the methods of Raman spectroscopy and atomic force microscopy. It is shown that when depositing
titanium-doped carbon coating on a titanium sublayer, more dispersed Csp$^2$
clusters are formed. At the same time, doped
carbon coatings are characterized by lower roughness and grain size.