The effect of plasma treatment of coatings based on organosilicon polymers deposited by electron beam dispersion on their structure and morphology

Changes in the composition, molecular structure and morphology of organosilicon coatings and composite layers based on organosilicon and high-molecular fluorocarbon compounds during their plasma treatment were determined by XPS, IR spectroscopy, and AFM microscopy.The plasma treatment of coatings causes destruction of Si – C bonds, elimination of hydrocarbon fragments and the formation of oxygen-containing groups, SiO$_2$-like structures, and an increase in the roughness of surface layers is shown. The destruction of the fluorocarbon component occurs during the plasma treatment of the composite coating. An increase in the mass fraction of PTFE in the initial target is not accompanied by a monotonic decrease in the surface energy of the deposited coating.