Optimization of laser polishing of quartz glass using the method of planning computational experiments

In this work, using the method of full factorial experiment and the method of enumeration of parameters, the process of laser polishing of quartz glass is optimized. As a result of finite element modeling, the modes of laser polishing of quartz glass using a CO$_2$ laser were determined. These modes provide the specified temperatures in the treatment zone at the minimum values of thermoelastic stresses in quartz plates.