Structure and mechanical properties of silicon-carbon coatings alloyed with chromium

The morphological features, phase composition, and mechanical properties of chromium-doped silicon-carbon coatings formed by ion-beam sputtering of a composite target based on silicon and chromium carbide are determined. It has been established that the introduction of chromium into the coating leads to a decrease in the oxygen concentration and contributes to the structural ordering of sp$^2$ clusters. Alloying with chromium Si / C coatings have a smoother surface and are characterized by increased plasticity, lower values of friction coefficients and volumetric wear of the counterbody.