Application of PWM signals to generate low-temperature atmospheric plasma

The use of pulse-width modulated signals for generating low-temperature atmospheric plasma in an inert gas environment is studied. The results of studies of the energy consumption of a low-temperature plasma generation system depending on the fill factor, as well as the pulse repetition rate, are presented. The system operating modes are identified, in which the minimum energy consumption is achieved, and possible ways to control the low-temperature plasma generation system to obtain the necessary plasma properties are determined.