Structure and mechanical properties of carbon coatings doped with zirconium and silicon

The influence of carbon plasma parameters on the chemical and phase composition, morphology, and mechanical properties of carbon coatings doped with zirconium and silicon from a gas flow generated by stationary electric arc evaporation has been determined. It has been established that an increase in the repetition rate of carbon plasma pulses and the associated decrease in zirconium concentration leads to an increase in the nanohardness of composite coatings, due to an increase in the content of sp$^3$-hybridized carbon atoms.