Laser layer wise quantitative analysis with submicron resolution of functional coatings of industrial products

The possibilities of the use of double-pulse laser atomic-emission spectroscopy for quantitative analysis with submicron resolution of brass, bronze and Ti-Zr-coatings have been examined. A new method to control the radiation flux density on the sample surface has been proposed. This method allows to change the thickness of evaporated substance layer from $0{,}1$ up to $5$ micrometer. It has been found that the heating of the sample during deposition of the coating leads to a heterogeneous distribution of elements due to the thermo diffusion.