P. Kh. Khabibullaev, M. S. Yunusov, Sh. Makhkamov, B. L. Oksengendler, Yu. V. Pakharukov, “Ionization-Induced Mechanism of Impurity Migration in Ion-Implanted Semiconductors”, Fizika i Tekhnika Poluprovodnikov, 1985, Volume 19, Issue 2,Pages <nobr>300

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Fizika i Tekhnika Poluprovodnikov, 1985 Volume 19, Issue 2, Pages 300–302 (Mi phts1076)

Short Notes

Ionization-Induced Mechanism of Impurity Migration in Ion-Implanted Semiconductors

P. Kh. Khabibullaev, M. S. Yunusov, Sh. Makhkamov, B. L. Oksengendler, Yu. V. Pakharukov