V. V. Monakhov, O. V. Romanov, S. N. Kirillov, V. Ya. Uritsky, V. A. Smirnov, “Stages of Formation of Silicon-Thermal Oxide Interface”, Fizika i Tekhnika Poluprovodnikov, 1986, Volume 20, Issue 3,Pages <nobr>477

JOURNALS // Fizika i Tekhnika Poluprovodnikov // Archive

Fizika i Tekhnika Poluprovodnikov, 1986 Volume 20, Issue 3, Pages 477–480 (Mi phts111)

Stages of Formation of Silicon-Thermal Oxide Interface

V. V. Monakhov, O. V. Romanov, S. N. Kirillov, V. Ya. Uritsky, V. A. Smirnov

Leningrad State University

UDC: 621.315.592

Received: 25.06.1985
Accepted: 03.10.1985